Now, let's introduce the first type of equipment: ECR plasma reactor.
ECR (Electron Cyclotron Resonance)
ECR refers to Electron Cyclotron Resonance. When a magnetic field is applied to a vacuum system, it initiates the rotational motion of electrons, known as cyclotron motion, which centers around the magnetic field lines. When microwaves with a frequency ω that match the rotation speed are introduced, the cyclotron motion resonates with the electric field, and the electrons absorb the energy from the electric field. This is called Electron Cyclotron Resonance. It effectively accelerates electrons and can impart a significant amount of energy. The plasma generated by this energy is called ECR plasma. ECR uses microwave energy to ionize gases, with a microwave frequency of 2.45 GHz.
In the following text, we will introduce the ICP system.
